Temperature Dependence of the Solubility of Nitrogen in Liquid Silicon Equilibrated with Silicon Nitride
نویسندگان
چکیده
The solubility of nitrogen in liquid silicon equilibrated with silicon nitride and its dependence on the composition of the atmosphere has been studied in the temperature region 1428–1542 C. High purity silicon was melted in silicon nitride crucibles under Ar and N2 atmospheres. The equilibrium was observed to be established within minutes, after which no evolution of the nitrogen content with time could be observed. The nitrogen transfer between the Si3N4-crucible and the melt was faster than the transfer via the gas-phase to such an extent that the composition of the atmosphere did not influence the solubility limit. The solubility limit as a function of temperature was found to follow:
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